b) Halbleiterbauelementen mit heterogener Struktur, z. B. HEMTs (high electron mobility transistors), HBTs (hetero-bipolar transistors), "quantum well devices" oder "super lattice devices";
b. Hetero-structure semiconductor devices such as high electron mobility transistors (HEMT), hetero-bipolar transistors (HBT), quantum well and super lattice devices;